-
1
-
-
0033704649
-
-
P. Vettiger, M. Despont, U. Drechsler, U. Dürig, W. Häberle, M.I. Lutwyche, H.E. Rothuizen, R. Stutz, R. Widmer, G.K. Binnig, IBM Journal of Research and Development 2000, 44 (Number 3). http://www.research.ibm.com/journal/rd/443/vettiger.html
-
(2000)
IBM Journal of Research Development
, vol.44
, Issue.3
-
-
Vettiger, P.1
Despont, M.2
Drechsler, U.3
Dürig, U.4
Häberle, W.5
Lutwyche, M.I.6
Rothuizen, H.E.7
Stutz, R.8
Widmer, R.9
Binnig, G.K.10
-
2
-
-
0029776922
-
-
M. Despont, U. Staufer, C. Stebler, H. Gross, P. Vettiger, Microelectron. Eng. 1996, 30, 69-72. http://www-samlab.unine.ch/Activities/Projects/MicroColumn/MicroColumn.htm
-
(1996)
Microelectron. Eng.
, vol.30
, pp. 69-72
-
-
Despont, M.1
Staufer, U.2
Stebler, C.3
Gross, H.4
Vettiger, P.5
-
3
-
-
85036850167
-
-
ITRS, http://public.itrs.net/files/1999_SIA_Roadmap/Litho.pdf
-
-
-
-
4
-
-
0033130707
-
-
H. Schift, R.W. Jaszewski, C. David, J. Gobrecht, Microelectronic Eng. 1999, 46, 121-124.
-
(1999)
Microelectronic Eng.
, vol.46
, pp. 121-124
-
-
Schift, H.1
Jaszewski, R.W.2
David, C.3
Gobrecht, J.4
-
5
-
-
85036856304
-
-
L.J. Heyderman, B. Ketterer, D. Bächle, F. Glaus, B. Haas, H. Schift, K. Vogelsang, J. Gobrecht, L. Tiefenauer, O. Dubochet, P. Surbled, T. Hessler, to be published in Microelectronic Eng. (2003).
-
(2003)
Microelectronic Eng.
-
-
Heyderman, L.J.1
Ketterer, B.2
Bächle, D.3
Glaus, F.4
Haas, B.5
Schift, H.6
Vogelsang, K.7
Gobrecht, J.8
Tiefenauer, L.9
Dubochet, O.10
Surbled, P.11
Hessler, T.12
-
6
-
-
0035356221
-
-
H. Schift, L.J. Heyderman, M. Auf der Maur, J. Gobrecht, Nanotechnology 2001, 12, 173-177.
-
(2001)
Nanotechnology
, vol.12
, pp. 173-177
-
-
Schift, H.1
Heyderman, L.J.2
Auf der Maur, M.3
Gobrecht, J.4
-
7
-
-
0034316494
-
-
H. Schift, A. D'Amore, C. David, M. Gabriel, J. Gobrecht, W. Kaiser, D. Simoneta, J. of Vac. Sci. Technol. B 2000, 18(6), 3564-3568.
-
(2000)
J. of Vac Sci. Technol. B
, vol.18
, Issue.6
, pp. 3564-3568
-
-
Schift, H.1
D'Amore, A.2
David, C.3
Gabriel, M.4
Gobrecht, J.5
Kaiser, W.6
Simoneta, D.7
-
8
-
-
0034207492
-
-
H. Schift, C. David, M. Gabriel, J. Gobrecht, L.J. Heyderman, W. Kaiser, S. Köppel, L. Scandella, Microelectronic Eng. 2000, 53, 171-174.
-
(2000)
Microelectronic Eng.
, vol.53
, pp. 171-174
-
-
Schift, H.1
David, C.2
Gabriel, M.3
Gobrecht, J.4
Heyderman, L.J.5
Kaiser, W.6
Köppel, S.7
Scandella, L.8
-
9
-
-
85036903791
-
-
PTB Berichte PTB-F-39 Braunschweig, Germany
-
J. Gobrecht, H. Schift, C. David, W. Kaiser, A. D'Amore, D. Simoneta, L. Scandella, PTB Berichte PTB-F-39 Braunschweig, Germany, 2000, 1-7.
-
(2000)
, pp. 1-7
-
-
Gobrecht, J.1
Schift, H.2
David, C.3
Kaiser, W.4
D'Amore, A.5
Simoneta, D.6
Scandella, L.7
|