Variable porous structure of laser-ablated silicon nanocluster films and its influence on photoluminescence properties

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4636, Issue , 2002, Pages 38-47

  Kabashin, A V ^a   Sylvestre, J P ^a   Patskovsky, S ^a   Meunier, M ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

Author keywords

Nanocluster film; Photoluminescence; Porosity; Pulsed laser ablation; Silicon

Indexed keywords

ANNEALING; LASER BEAM EFFECTS; OXIDATION; PHOTOLUMINESCENCE; POROSITY; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON;

SILICON NANOCLUSTER FILMS;

NANOSTRUCTURED MATERIALS;

EID: 0036407483     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.459735     Document Type: Conference Paper

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