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Materials Research Society Symposium - Proceedings
Volumn 617, Issue , 2000, Pages J551-J556
Laser micromachining of metallic mold inserts for replication techniques
(5)
Pfleging, W
a
Meier, A
a
Hanemann, T
a
Gruhn, H
a
Zum Gahr, K H
a
a
KARLSRUHE INSTITUTE OF TECHNOLOGY
(
Germany
)
Author keywords
[No Author keywords available]
Indexed keywords
ELECTROPHORESIS; ETCHING; EXCIMER LASERS; INJECTION MOLDING; LASER ABLATION; METALLIC COMPOUNDS; MICROMACHINING; MICROSTRUCTURE; SURFACE ROUGHNESS;
LASER MICROMACHINING; METALLIC MOLDS;
MOLDS;
EID
:
0034438344
PISSN
:
02729172
EISSN
:
None
Source Type
:
Journal
DOI
:
10.1557/PROC-617-J5.5
Document Type
:
Article
Times cited : (
3
)
References (
17
)
1
0030091527
(1996)
J. Micromech. Microeng.
, vol.6
, pp. 14-28
Jansen, H.
1
Gardeniers, H.
2
De Boer, M.
3
Elwenspoek, M.
4
Fluitman, J.
5
2
0004866329
FZKA
(1998)
Wissenschaftliche Berichte des Forschungszentrum Karlsruhe GmbH
, vol.6080
, pp. 77-82
Pantenburg, F.J.
1
Achenbach, S.
2
Sesterhenn, M.
3
3
0029253633
(1995)
Applied Surface Science
, vol.86
, pp. 266-277
Kreutz, E.W.
1
Frerichs, H.
2
Mertin, M.
3
Wesner, D.A.
4
Pfleging, W.
5
4
0004887848
(1998)
th Int. Conf. on New Actuators
, pp. 376-379
Pfleging, W.
1
Ludwig, A.
2
Quandt, E.
3
5
0002951296
(1998)
Proc. European Conf. on Laser Treatment of Materials ECLAT 98
, pp. 443-448
Pfleging, W.
1
Piotter, V.
2
Hanemann, T.
3
6
0004891823
WILEY-VCH
(1999)
Werkstoffe für die Informationstechnik/Mikrosystemtechnik
, pp. 297-302
Hanemann, T.
1
Haußelt, J.H.
2
Ruprecht, R.
3
Pfleging, W.
4
7
0042915008
(1998)
American Chemical Society Symposium Series
, vol.706
, pp. 67-75
Hanemann, T.
1
Piotter, V.
2
Ruprecht, R.
3
Haußelt, J.H.
4
8
0003997230
(1997)
Microsystem Technologies
, pp. 129-133
Piotter, V.
1
Ruprecht, R.
2
Haußelt, J.
3
9
0000204571
(1998)
Microsystem Technologies
, vol.4
, pp. 117-119
Bacher, W.
1
Bade, K.
2
Matthis, B.
3
Saumer, M.
4
10
0029419380
(1995)
SPIE Proc. Micromachining and Microfabrication Process Technology
, vol.2639
, pp. 164-173
Abraham, M.
1
Arnold, J.
2
Ehrfeld, W.
3
Hesch, K.
4
Möbius, H.
5
Paatzsch, T.
6
Schulz, C.
7
11
0004870112
(1996)
Microsystem Technologies 3
, pp. 17-19
Lawes, R.A.
1
Holmes, A.S.
2
Goodall, F.N.
3
12
0002706807
(1998)
Microsystem Technologies
, vol.5
, pp. 90-92
Shimizu, T.
1
Murakoshi, Y.
2
Sano, T.
3
Maeda, R.
4
13
0004899431
WILEY-VCH Verlag GmbH, Weinheim
(1999)
Werkstoffe für die Informationstechnik/Mikrosystemtechnik
, pp. 359-364
Gillner, A.
1
Poprawe, R.
2
14
0002870913
Aachen, Germany
(2000)
Proc. of the International Seminar on Precision Engineering and Micro Technology
, pp. 105-112
Gillner, A.
1
15
0004863081
(1998)
Proc. European Conf. on Laser Treatment of Materials ECLAT 98
, pp. 385-390
Abeln, T.
1
Radke, J.
2
Dausinger, F.
3
Hügel, H.
4
16
0000861310
(2000)
Surface Engineering Euromat
, vol.11
, pp. 455-460
Pfleging, W.
1
Hanemann, T.
2
Meier, A.
3
17
0032306631
(1998)
SPIE Proc. Microfiuidic Devices and Systems
, pp. 177-182
Becker, H.
1
Dietz, W.
2
* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.
