Fabrication of micro-parts by high aspect ratio structuring and metal injection molding using the supercritical debinding method

Microsystem Technologies

Volumn 5, Issue 2, 1998, Pages 90-92

  Shimizu, T ^a   Murakoshi, Y ^a   Sano, T ^a   Maeda, R ^a   Sugiyama, S ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002706807     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050147     Document Type: Article

References (4)

1. Hirata Y; Okuyama H; Ogino S (1995) Piezoelectric composites for micro-ultrasonic transducers realized with deep-etch X-ray lithography. Proc. 1995 IEEE MEMS Workshop, pp. 191-196
2. Akedo J; Ichiki M; Kikuchi K; Maeda R (1997) Fabrication of three dimensional micro structure composed of different materials using excimer laser ablation and jet molding. Proc. 1997 IEEE MEMS Workshop, pp. 135-140
3. 2 on MIM process. Adv powder Metal Particulate Mater 19: 207-212
4. Foong ML; Tam KC; Loh NH (1995) Yield stress behavior of metal injection molding suspensions at elevated temperature. J Mater Sci 30: 3625-3632