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Volumn 158-159, Issue , 2002, Pages 680-684
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Transition metal nitrides thin films deposition using a dynamically controlled magnetron sputtering apparatus
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Author keywords
Magnetron sputtering; Nitrides; Thin films
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Indexed keywords
BACKSCATTERING;
BIOCOMPATIBILITY;
COMPUTER CONTROL;
CORROSION PREVENTION;
DEPOSITION;
MAGNETRON SPUTTERING;
MICROSTRUCTURE;
NITRIDES;
STOICHIOMETRY;
STRESS ANALYSIS;
THIN FILMS;
TOOLS;
TRANSITION METALS;
X RAY DIFFRACTION;
DYNAMIC PARTIAL PRESSURE CONTROL;
COATING TECHNIQUES;
SPUTTERING;
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EID: 0036397148
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(02)00242-6 Document Type: Article |
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Times cited : (27)
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References (10)
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