Microhardness characterization of multilayers modified by ion beam mixing

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 175, Issue 177, 2001, Pages 620-625

  Blando, Eduardo ^a   Tentardini, E K ^a   Hübler, Roberto ^a  

^a PONTIFICAL CATHOLIC UNIVERSITY OF RIO GRANDE DO SUL   (Brazil)

Author keywords

Ion beam mixing; Microhardness; Multilayers; Sputtering; Superlattices

Indexed keywords

CORROSION RESISTANCE; INTERFACES (MATERIALS); ION BOMBARDMENT; MAGNETRON SPUTTERING; MICROHARDNESS; MULTILAYERS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; STRESS ANALYSIS; SUBSTRATES; SUPERLATTICES; THIN FILMS;

INTRINSIC STRESS; ION BEAM MIXING;

PROTECTIVE COATINGS;

EID: 0035302375     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(00)00606-6     Document Type: Article

References (14)