Epitaxial recrystallization of amorphized α-quartz after sodium ion implantation and oxygen annealing

Surface and Coatings Technology

Volumn 158-159, Issue , 2002, Pages 436-438

  Dhar, S ^a   Gasiorek, S ^a   Lang, M ^a   Lieb, K P ^a   Keinonen, J ^b   Sajavaara, T ^b  

^a II Physikalisches Institut   (Germany)

^b UNIVERSITY OF HELSINKI   (Finland)

Author keywords

ERDA; Ion implantation; Quartz; RBS channelling; Solid phase epitaxy

Indexed keywords

ANNEALING; DOPING (ADDITIVES); EPITAXIAL GROWTH; ION IMPLANTATION; OPTOELECTRONIC DEVICES; QUARTZ; RECRYSTALLIZATION (METALLURGY); RUTHERFORD BACKSCATTERING SPECTROSCOPY;

DETECTION ANALYSIS;

COATING TECHNIQUES;

ION IMPLANTATION;

EID: 0036396133     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00269-4     Document Type: Article

References (18)