Network modification and epitaxial recrystallisation of ionimplanted α-quartz

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 148, Issue 1-4, 1999, Pages 692-697

  Roccaforte, F ^a   Bolse, W ^a,b   Lieb, K P ^a  

^a UNIVERSITY OF GÖTTINGEN   (Germany)

^b UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Epitaxial regrowth; Network modifiers; Quartz

Indexed keywords

ANNEALING; CESIUM; CRYSTAL STRUCTURE; CRYSTALLIZATION; DISSOLUTION; EPITAXIAL GROWTH; ION IMPLANTATION; OXYGEN; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON; STOICHIOMETRY; XENON;

EPITAXIAL RECRYSTALLIZATION;

QUARTZ;

EID: 0033513879     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00661-2     Document Type: Article

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