Ion beam doping and epitaxial regrowth of α-quartz

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 178, Issue 1-4, 2001, Pages 237-241

  Roccaforte, F ^a,b   Harbsmeier, F ^a   Dhar, S ^a   Lieb, K P ^a  

^a UNIVERSITY OF GÖTTINGEN   (Germany)

^b INFM   (Italy)

Author keywords

quartz; Epitaxial crystallization; Ion implantation; Optical spectroscopy

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; CRYSTAL GROWTH; CRYSTALLIZATION; DEPOSITION; DOPING (ADDITIVES); ION BEAMS; ION IMPLANTATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SINGLE CRYSTALS; THIN FILMS;

EPITAXIAL CRYSTALLIZATION; OPTICAL SPECTROSCOPY;

QUARTZ;

EID: 0035333190     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(00)00470-5     Document Type: Conference Paper

References (13)