Ultra-high accuracy measurement of the coefficient of thermal expansion for ultra-low expansion materials

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4688, Issue 1, 2002, Pages 469-480

  Badami, Vivek G ^a   Linder, Michael ^a  

^a Corning Tropel ^*  (United States)

Author keywords

Coefficient of thermal expansion; Dilatometer; Dilatometry; Laser interferometry; Periodic nonlinearity; ULE; Ultra high accuracy; Uncertainty estimate

Indexed keywords

DILATOMETERS; DIMENSIONAL STABILITY; INTERFEROMETERS; INTERFEROMETRY; LASER OPTICS; LIGHT REFLECTION; OPTICAL RESOLVING POWER; PHOTOLITHOGRAPHY; THERMAL EXPANSION;

LASER INTERFEROMETRY;

OPTICAL MATERIALS;

EID: 0036381413     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.472323     Document Type: Article

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