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Materials Research Society Symposium - Proceedings

Volumn 705, Issue , 2002, Pages 133-138

Formation of Al nanodot array by the combination of nano-indentation and anodic oxidation

(5) Shingubara, S a Murakami, Y a Morimoto, K a Sakaue, H a Takahagi, T a

a HIROSHIMA UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ANODIC OXIDATION; ATOMIC FORCE MICROSCOPY; ETCHING; FILMS; NANOTECHNOLOGY; POROUS MATERIALS; SCANNING ELECTRON MICROSCOPY;

ALUMINUM NANODOT ARRAY; NANO-INDENTATION; POROUS ALUMINA FILM; SELECTIVE WET CHEMICAL ETCHING;

NANOSTRUCTURED MATERIALS;

EID: 0036351808 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (6)

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