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Volumn 82, Issue 1, 1999, Pages 213-215

Fabrication of lead zirconate titanate microrods for 1-3 piezocomposites using hot isostatic pressing with silicon molds

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0000490920     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.1999.tb01745.x     Document Type: Article
Times cited : (47)

References (12)
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  • 2
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    • Piezoelectric composite materials for ultrasonic transducer applications. Part I: Resonant modes of vibration of PZT rod-polymer composites
    • T. R. Gururaja, W. A. Schulze, L. E. Cross, R. E. Newnham, B. A. Adult, and Y. J. Wang, " Piezoelectric Composite Materials for Ultrasonic Transducer Applications. Part I: Resonant Modes of Vibration of PZT Rod-Polymer Composites," IEEE Trans. Sonics Ultrason., SU-32 [4] 481-98 (1985).
    • (1985) IEEE Trans. Sonics Ultrason. , vol.SU-32 , Issue.4 , pp. 481-498
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  • 3
    • 0029406181 scopus 로고
    • Overview of fine-scale piezoelectric ceramic/polymer composite processing
    • V. F. Janas and A. Safari, " Overview of Fine-Scale Piezoelectric Ceramic/Polymer Composite Processing," J. Am. Ceram. Soc., 78 [11] 2945-55 (1995).
    • (1995) J. Am. Ceram. Soc. , vol.78 , Issue.11 , pp. 2945-2955
    • Janas, V.F.1    Safari, A.2
  • 4
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    • Microstructuring technology
    • Institute of Electrical and Electronic Engineers, Piscataway, NJ
    • K. Lubitz, A. Wolff, and G. Preu, " Microstructuring Technology" ; pp. 515-24 in Proceedings of the 1993 IEEE Ultrasonics Symposium. Institute of Electrical and Electronic Engineers, Piscataway, NJ, 1993.
    • (1993) Proceedings of the 1993 IEEE Ultrasonics Symposium , pp. 515-524
    • Lubitz, K.1    Wolff, A.2    Preu, G.3
  • 5
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    • Piezoelectric composites for micro-ultrasonic transducers realized with deep-etch X-ray lithography
    • Institute of Electrical and Electronics Engineers, Piscataway, NJ
    • (a) Y. Hirata, H. Okuyama, S. Ogino, T. Numazawa, and H. Takada, " Piezoelectric Composites for Micro-Ultrasonic Transducers Realized with Deep-Etch X-ray Lithography" ; pp. 191-96 in Proceedings of the 1995 IEEE MEMS Workshop (Amsterdam, Netherlands). Institute of Electrical and Electronics Engineers, Piscataway, NJ, 1995.
    • (1995) Proceedings of the 1995 IEEE MEMS Workshop (Amsterdam, Netherlands) , pp. 191-196
    • Hirata, Y.1    Okuyama, H.2    Ogino, S.3    Numazawa, T.4    Takada, H.5
  • 7
    • 0038329684 scopus 로고
    • High-speed directional low-temperature dry etching for bulk silicon micromachining
    • Tokosha Co. Ltd., Tokyo, Japan
    • M. Takinami, K. Minami, and M. Esashi, " High-Speed Directional Low-Temperature Dry Etching for Bulk Silicon Micromachining" ; pp. 15-18 in Technical Digest of the 11th Sensor Symposium (Kawasaki, Japan). Tokosha Co. Ltd., Tokyo, Japan, 1992.
    • (1992) Technical Digest of the 11th Sensor Symposium (Kawasaki, Japan) , pp. 15-18
    • Takinami, M.1    Minami, K.2    Esashi, M.3
  • 9
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    • Thin beam bulk micromachining based on RIE and Xenon difluoride silicon etching
    • Institute of Electrical and Electronics Engineers, Piscataway, NJ
    • R. Toda, K. Minami, and M. Esashi, " Thin Beam Bulk Micromachining Based on RIE and Xenon Difluoride Silicon Etching" ; pp. 671-74 in Digest of Technical Papers of Transducers '97 (Chicago, IL). Institute of Electrical and Electronics Engineers, Piscataway, NJ, 1997.
    • (1997) Digest of Technical Papers of Transducers '97 (Chicago, IL) , pp. 671-674
    • Toda, R.1    Minami, K.2    Esashi, M.3
  • 10
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    • Master's Degree Thesis. Department of Mechatronics, Tohoku University, Sendai, Japan
    • T. Soga, " A Study of Functionally Graded Piezoceramic Actuators" ; Master's Degree Thesis. Department of Mechatronics, Tohoku University, Sendai, Japan, 1998.
    • (1998) A Study of Functionally Graded Piezoceramic Actuators
    • Soga, T.1
  • 11
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    • Y. Haga, Y. Tanahashi, and M. Esashi, " Small Diameter Active Catheter Using Shape Memory Alloy" ; pp. 419-24 in Proceedings of the 1998 IEEE MEMS Workshop (Heidelberg, Germany). Institute of Electrical and Electronics Engineers, Piscataway, NJ, 1998.
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.