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Volumn 85, Issue 1, 2002, Pages 179-186

Effects of methane concentration in the deposition process on the crystal structure and the adhesive fracture toughness of CVD diamond

(6) Takahashi, Hironori a Kamiya, Shoji a Saka, Masumi a Sato, Futami a Tanaka, Michiyoshi a Abé, Hiroyuki a

a TOHOKU UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; CHEMICAL VAPOR DEPOSITION; CRYSTAL STRUCTURE; FRACTURE TOUGHNESS; INTERFACES (MATERIALS); METHANE; SILICON CARBIDE; TRANSMISSION ELECTRON MICROSCOPY;

ADHESIVE FRACTURE;

DIAMONDS;

EID: 0036343545 PISSN: 00027820 EISSN: None Source Type: Journal
DOI: 10.1111/j.1151-2916.2002.tb00063.x Document Type: Article

Times cited : (3)

References (25)

1
- 0024610549
- Diamond-ceramic coating of the future
- (1989) J. Am. Ceram. Soc. , vol.72 , Issue.2 , pp. 171-191
- Spear, K.E.¹

2
- 0000143835
- Temperature dependence and effect of series resistance on the electrical characteristics of a polycrystalline diamond metal-insulator-semiconductor diode
- (1995) J. Appl. Phys. , vol.78 , Issue.2 , pp. 1101-1107
- Kang, W.P.¹ Davidson, J.L.² Gurbuz, Y.³ Kerns, D.V.⁴

3
- 0009661538
- Law-pressure, metastable growth of diamond and 'diamondlike' phases
- Washington, D.C.
- (1988) Science , vol.241 , pp. 913-921
- Angus, J.C.¹ Hayman, C.C.²

4
- 0001080152
- Diamond deposition technologies
- (1992) Diamond Relat. Mater. , vol.1 , Issue.1 , pp. 1021-1034
- Bachmann, P.K.¹ Van Enckevort, W.²

5
- 0031642352
- Process control during diamond coating of tool
- (1998) Int. J. Refract. Met. Hard Mater. , vol.16 , Issue.2 , pp. 191-199
- Deuerler, F.¹ Peterseim, J.² Gruner, H.³ Wang, Q.⁴ Buck, V.⁵

6
- 0001125723
- Adhesion of diamond films on various substrates
- (1990) Mater. Res. Soc. Symp, Proc. , vol.168 , pp. 207-212
- Yen, T.T.¹ Kuo, C.T.² Hsu, S.E.³

7
- 0031146843
- Diamond deposition onto WC-6%Co cutting tool material: Coating structure and interracial bond strength
- (1997) Thin Solid Films , vol.300 , pp. 164-170
- Alam, M.¹ Peebles, D.E.² Tallant, D.R.³

8
- 0031245672
- Application of heat treatment and dispersive strengthening concept in interlayer deposition to enhance diamond film adherence
- (1997) Thin Solid Films , vol.308-309 , Issue.1-2 , pp. 273-278
- Lin, C.R.¹ Kuo, C.T.² Chang, R.M.³

9
- 0000580728
- A multilayer approach to high adhesion diamond-like carbon coatings on titanium
- (1997) Diamond Relat. Mater. , vol.6 , Issue.7 , pp. 802-806
- Dumkum, C.¹ Grant, D.M.² McColl, I.R.³

10
- 0028374969
- Morphologies and adhesion strength of diamond films deposited on WC-6%Co cemented Cs with different surface characteristics
- (1994) Thin Solid Films , vol.239 , Issue.1 , pp. 47-50
- Peng, X.-L.¹ Gan, Z.-P.²

11
- 0031246618
- Effect of sandblasting on adhesion strength of diamond coatings
- (1997) Thin Solid Films , vol.307 , Issue.1-2 , pp. 21-28
- Zhang, B.¹ Zhou, L.²

12
- 0026418921
- A review of the methods for the evaluation of coating-substrate adhesion
- (1991) Mater. Sci. Eng. A , vol.140 , pp. 583-592
- Chalker, P.R.¹ Bull, S.J.² Rickerby, D.S.³

13
- 84896146608
- A review of the mechanical tests for assessment of thin-film adhesion
- (1989) J. Vac. Sci. Technol. A , vol.7 , pp. 2267-2272
- Steinmann, P.A.¹ Hintermann, H.E.²

14
- 0032628351
- A comparative study of adhesion test methods for hard coatings
- (1999) Surf. Coat. Technol. , vol.113 , pp. 86-102
- Ollendoff, H.¹ Schneider, D.²

15
- 0032292237
- Direct, measurement of the adhesive fracture resistance of CVD diamond particles
- (1998) ASME J. Electron. Packag. , vol.120 , Issue.4 , pp. 367-371
- Kamiya, S.¹ Takahashi, H.² Saka, M.³ Abé, H.⁴

16
- 0345771589
- Evaluation and improvement of the adhesive fracture toughness of CVD diamond on silicon substrate
- Edited by E. Suhir, Y. C. Lee, M. Shiratori, and G. Subbarayan. American Society of Mechanical Engineers, New York
- (1999) Proceedings of the PACIFIC RIM/ASME International Intersociety Electronic and Photonic Packaging Conference, Inter Pack '99 , vol.1 , pp. 763-767
- Kamiya, S.¹ Takahashi, H.² Saka, M.³ Abé, H.⁴

17
- 0003598030
- Krieger Publishing Co., Malabar, FL
- (1977) Electron Microscopy of Thin Crystals
- Hirsch, P.¹ Howie, A.² Nicholson, R.³ Pashley, D.W.⁴ Whelan, M.J.⁵

18
- 0001556381
- Axis/angle pair descriptions of coincidence site lattice grain boundaries
- (1971) Scr. Metall. , vol.5 , pp. 365-370
- Pumphrey, P.H.¹ Bowkett, K.M.²

19
- 0031125510
- Fracture toughness of polysilicon microdevices: A first report
- (1997) J. Mater. Res. , vol.12 , Issue.4 , pp. 915-922
- Ballarini, R.¹ Mullen, R.L.² Yin, Y.³ Kahn, H.⁴ Stemmer, S.⁵ Heuer, A.H.⁶

20
- 85047668735
- Intrinsic toughness on interfaces between SiC coating and substrates of Si or C fibre
- (1989) J. Mater. Sci. , vol.24 , pp. 1207-1218
- Argon, A.S.¹ Gupta, V.² Landis, H.S.³ Cornie, J.A.⁴

21
- 0019009450
- Fracture toughness of silicon
- (1980) Am. Ceram. Soc. Ball. , vol.59 , Issue.4 , pp. 469-472
- Chen, C.P.¹ Leipold, M.N.²

22
- 0003770748
- Bntterworth-Heinemann Ltd., Oxford, U.K.
- (1991) Properties and Applications of Diamond , pp. 183
- Wilks, J.¹ Wilks, E.²

23
- 0010031220
- Morphology, atomic structure and electron structure of artificial diamond grain boundary
- (1996) JEOL News , vol.32 E , pp. 16-19
- Ichinose, H.¹ Zhang, Y.² Ishida, Y.³ Ito, K.⁴ Nakanose, M.⁵

24
- 0000108265
- Analysis of chemical-vapour-deposited diamond grain boundaries using transmission electron microscopy and parallel electron energy loss spectroscopy in a scanning transmission electron microscope
- (1993) Diamond Relat. Mater. , vol.2 , pp. 1004-1011
- Fallon, P.¹ Brown, L.M.²

25
- 84987278794
- Grain-size dependence of fracture energy in ceramics: I, experiment
- (1981) J. Am. Ceram. Soc. , vol.64 , Issue.6 , pp. 345-350
- Rice, R.W.¹ Freiman, S.W.² Becher, P.F.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.