Evaluation of Mechanical Properties and Strain Criterion for Realibility Design of Micromachined Polysilicon Thin Films

International Journal of Nonlinear Sciences and Numerical Simulation

Volumn 3, Issue 3-4, 2002, Pages 657-660

  Ding, Jian Ning ^a   Yang, Ji Chang ^a   Cai, Lan ^a   Wen, Shi Zhu ^b  

^a JIANGSU UNIVERSITY   (China)

^b TSINGHUA UNIVERSITY   (China)

Author keywords

Bending strength; Polysilicon; Strain analysis; Tensile strength

Indexed keywords

EID: 0036329017     PISSN: 15651339     EISSN: None     Source Type: Journal    
DOI: 10.1515/IJNSNS.2002.3.3-4.657     Document Type: Article

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