Prediction of operating region of pulse-modulated radio frequency inductively coupled thermal plasma

Journal of Physics D: Applied Physics

Volumn 33, Issue 15, 2000, Pages 1843-1853

  Hossain, M M ^a   Paul, K C ^a   Tanaka, Y ^a   Sakuta, T ^a   Ishigaki, T ^b  

^a KANAZAWA UNIVERSITY   (Japan)

^b NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENTS; MATHEMATICAL MODELS; PULSE MODULATION; SPECTROMETRY;

INDUCTIVELY COUPLED PLASMAS (ICP); RADIOFREQUENCY PLASMAS;

PLASMA CONFINEMENT;

EID: 0034251434     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/33/15/314     Document Type: Article

References (17)

1. Reed T B 1961 J. Appl. Phys. 32 821-4
2. Ramakrishnan S, Gershenzon M, Poliyka F, Kearney T N and Rogozinski M W 1997 IEEE Trans. Plasma Sci. 25 937-6
3. Paul K C, Nakata T, Cliteur G J, Mostaghimi J and Sakuta T 1997 Proc. XIIth Int. Conf. on Gas Discharge and Their Applications (Greifswald, Germany) vol 1, pp 42-5
4. Mostaghimi J and Boulos M 1994 Inductively Coupled Plasma in Analytical Atomic Spectrometry vol II, ed A Montaser and W D Golightly (New York: VCH) pp 949-84
5. Boulos M I and Barnes R M 1987 Inductively Coupled Plasma Emission Spectroscopy Part II, ed P J Boumans (New York: Wiley)
6. Mostaghimi J and Boulos M I 1989 Plasma Chem. Plasma Proc. 9 25-44
7. Cai M, Montaser A and Mostaghimi J 1993 Spectrochim. Acta B 48 789-807
8. Cai M, Montaser A and Mostaghimi J 1995 Appl. Spectrosc. 49 1390-402
9. Paul K C, Takashima T and Sakuta T 1998 IEEE Trans. Plasma Sci. 26 1000-9
10. Mostaghimi J, Paul K C and Sakuta T 1998 J. Appl. Phys. 83 1898-908
11. Sakuta T, Sakashita N, Yoshida T, Takashima T and Miyamoto M 1997 IEEE Trans. Plasma Sci. 25 1029-33
12. Ishigaki T, Xiaobao Fan, Sakuta T, Banjo T and Shibuya Y 1997 Appl. Phys. Lett. 71 3787-9
13. Patankar S V 1980 Numerical Heat Transfer and Fluid Flow (Washington, DC: Hemisphere)
14. Devoto R S 1967 Phys. Fluids 10 354
15. Olsen H N 1959 Phys. Fluids 2 614
16. Mensing A E and Boedeker L R 1969 Theoretical Investigation of RF Induction Heated Plasmas NASA Conference Report CR-1312
17. Boulos M I, Fauchais P and Pfender E 1994 Thermal Plasmas: Fundaments and Applications vol 1 (New York: Plenum)