Single crystal silicon supported thin film micromirrors for optical applications

Optical Engineering

Volumn 36, Issue 5, 1997, Pages 1408-1413

  Yao, Zhimin J ^a   MacDonald, Noel C ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

Mechanical polishing; Micro opto electro mechanical systems; Micromirrors; Planarization; Single crystal silicon; Single crystal silicon reactive etching and metallization; Vertical actuators

Indexed keywords

EID: 0008968081     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601349     Document Type: Article

References (13)

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