III-V compound semiconductor micromachined actuators for long resonator tunable Fabry-Pérot detectors

Sensors and Actuators, A: Physical

Volumn 68, Issue 1-3, 1998, Pages 365-371

  Dehé, Alfons ^a   Peerlings, Joachim ^a   Pfeiffer, Joachim ^a   Riemenschneider, Rolf ^a   Vogt, Alexander ^a   Streubel, Klaus ^b   Künzel, Harald M ^c   Meissner, Peter ^a   Hartnagel, Hans L ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

^b ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^c FRAUNHOFER HEINRICH HERTZ INSTITUTE   (Germany)

Author keywords

MEMS devices; Tunable filters; Wavelength division multiplexing

Indexed keywords

DETECTORS; FREQUENCY DIVISION MULTIPLEXING; MICROELECTROMECHANICAL DEVICES; OPTICAL FILTERS; RESONATORS;

FABRY-PEROT DETECTORS; TUNABLE FILTERS;

ACTUATORS;

EID: 0041636164     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00071-5     Document Type: Article

References (6)

1. E.C. Vail, M.S. Wu, G.S. Li, L. Eng, C.J. Chang-Hasnain, GaAs micromachined widely tunable Fabry-Pérot filters, Electron. Lett. 2 (1995) 228-229.
2. A.T.T.D. Tran, Y.H. Lo, Z.H. Zhu, D. Haronian, E. Mozdy, Surface micromachined GaAs-AlAs Fabry-Pérot tunable filter, IEEE Photonics Technol. Lett. 8 (3) (1996) 393-395.
3. C.D. Chaffee, Telecoms mix wavelengths to boost markets, Photonics Spectra, (Aug.) (1996) 393-395.
4. J. Peerlings, A. Dehé, A. Vogt, M. Tilsch, C. Hebeler, F. Langenhan, P. Meissner, H.L. Hartnagel, Long resonator micromachined tunable GaAs/AlAs Fabry-Pérot filter, IEEE Photonics Technol. Lett. 9 (9) (1997) 1235-1237.
5. A. Dehé, H.L. Hartnagel, Freestanding AlGaAs thermopiles for improved sensor design, IEEE Trans. Electron Devices 43 (8) (1996) 1193-1199.
6. A. Dehé, D. Pavlidis, K. Hong, H.L. Hartnagel, InGaAs/InP thermoelectric infrared sensor utilizing surface bulk micromachining technology, IEEE Trans. Electron Devices 44 (6) (1997) 1193-1199.