Field emission characteristics of CoSi2/TaN-coated silicon emitter tips

IEEE Electron Device Letters

Volumn 23, Issue 1, 2002, Pages 10-12

  Han, Byung Wook ^b   Lee, Jae Sin ^c   Ahn, Byung Tae ^a,b  

^a Korea Advanced Institute of Science and Technology ^*

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^c University of Ulsan   (South Korea)

Author keywords

Emission stability; Si field emitter; Work function

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CHROMATE COATINGS; COBALT COMPOUNDS; ELECTRIC CONDUCTIVITY; ELECTRIC POTENTIAL; ELECTRON TRANSPORT PROPERTIES; SPUTTERING; TANTALUM COMPOUNDS;

SILICON EMITTER TIPS;

ELECTRON DEVICES;

EID: 0036163373     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.974796     Document Type: Article

References (18)

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