Diamond nucleation enhancement on reconstructed Si(100)

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 20, Issue 1, 2002, Pages 202-205

  Chiem, Chu Van ^a   Kim, Jung Hyun ^a   Shin, Hyung Shik ^a   Seo, J M ^a  

^a Chonbuk National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CHEMICAL MODIFICATION; CHEMICAL VAPOR DEPOSITION; CRYSTAL ORIENTATION; NUCLEATION; SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE; SILICON WAFERS; X RAY PHOTOELECTRON SPECTROSCOPY;

BIAS ENHANCED NUCLEATION; HOT FILAMENT CHEMICAL VAPOR DEPOSITION; NUCLEATION DENSITY;

DIAMONDS;

EID: 0036160359     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1427889     Document Type: Article

References (17)