Deposition of heteroepitaxial diamond film on (100) silicon in the dense plasma

Applied Physics Letters

Volumn 68, Issue 6, 1996, Pages 756-758

  Kim, Yoon Kee ^a   Lee, Ki Young ^a   Lee, Jai Young ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001399469     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116732     Document Type: Article

References (16)

1. K. Begelow, Proceedings of the 2nd International Conference on the Application of Diamond Films and Related Materials, edited by M. Yoshikawa, M. Murakawa, Y. Tzeng, and W. A. Yarbrough (Myuk.k, Tokyo, 1993), p. 5.
2. Diamond Films and Coatings; Development, Properties and Applications, edited by R. F. Davis (Noyes, New Jersey, 1993).
3. M. Yoshikawa, H. Ishida, A. Ishitani, S. Koizumi, and T. Inuzuka, Appl. Phys. Lett. 58, 1387 (1991).
4. A. Argoitia, J. C. Angus, J. S. Ma, L. Wang, P. Dirouz, and W. R. L. Lambrecht, J. Mater. Res. 9, 1849 (1994).
5. T. Tsuno, T. Imai, Y. Nishibayashi, K. Hamada, and N. Fujimori, Jpn. J. Appl. Phys. 30, 1063 (1991).
6. A. R. Badzian, T. Badzian, X. H. Wang, and T. M. Hartnett, Proceedings of the 2nd International Conference on New Diamond and Technology (Materials Research Society, Pittsburgh, PA, 1991).
7. X. Jiang, C.-P. Klages, M. Rösler, R. Zachai, M. Hartweg, and H. J. Füsser, Appl. Phys. A 57, 483 (1993).
8. B. R. Stoner, S. R. Sahaida, J. P. Bade, R. Southworth, and P. J. Ellis, J. Mater. Res. 8, 1334 (1993).
9. S. D. Walter, B. R. Stoner, J. T. Glass, P. J. Ellis, D. S. Buhaenko, C. E. Jenkins, and P. Southworth, Appl. Phys. Lett. 62, 1215 (1993).
10. X. Jiang E. Boettger, M. Paul, and C.-P. Klages, Appl. Phys. Lett. 65, 1519 (1994).
11. H. Maeda, M. Irie, T. Hino, K. Kusakabe, and S. Morooka, J. Mater. Res. 10, 158 (1995).
12. P. John, D. K. Milne, P. G. Roberts, M. G. Jubber, M. Liehr, and J. J. B. Wilson, J. Mater. Res. 9, 3083 (1994).
13. W. Zhu, X. H. Wang, B. R. Stoner, G. H. M. Ma, H. S. Kong, M. W. H. Braun, and J. T. Glass, Phys. Rev. B 47, 6529 (1993).
14. Y. K. Kim, K. Y. Lee, and J. Y. Lee, Thin Solid Films (in press).
15. A. Campargue, L. Fayette, B. Marcus, M. Chenevier, M. Mermoux, and A. Rossi, Appl. Phys. Lett. 62, 134 (1993).
16. P. Gonon, E. Gheeraert, A. Deneuville, and L. Abello, Thin Solid Films 256, 13 (1995).