CMOS micromachined cantilever-in-cantilever devices with magnetic actuation

IEEE Electron Device Letters

Volumn 17, Issue 7, 1996, Pages 372-374

  Shen, B ^b   Allegretto, W ^a,b   Hu, M ^b,c   Robinson, A M ^a,b  

^a IEEE

^b UNIVERSITY OF ALBERTA   (Canada)

^c TIANJIN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ANISOTROPY; CMOS INTEGRATED CIRCUITS; ETCHING; MAGNETIC DEVICES; MICROELECTRONICS; MICROMACHINING; MIRRORS; RESONANCE; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DEVICE STRUCTURES;

BIDIRECTIONAL DEFLECTION; CMOS MICROMACHINED CANTILEVER IN CANTILEVER DEVICES; MAGNETIC ACTUATION; MICROACTUATORS;

MOS DEVICES;

EID: 0030182810     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.506371     Document Type: Article

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