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Volumn , Issue , 2002, Pages 455-458
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Atomic layer deposition of conformal dielectric and protective coatings for released micro-electromechanical devices
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINA;
ATOMS;
COATING TECHNIQUES;
DIELECTRIC MATERIALS;
ELECTROSTATICS;
PROTECTIVE COATINGS;
SEMICONDUCTOR DEVICE MANUFACTURE;
STIFFNESS;
ATOMIC LAYER DEPOSITION;
CONFORMAL LAYER DEPOSITION;
ELECTROSTATIC TESTING;
MICROELECTROMECHANICAL DEVICES;
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EID: 0036121903
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (9)
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References (6)
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