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Volumn , Issue , 2002, Pages 455-458

Atomic layer deposition of conformal dielectric and protective coatings for released micro-electromechanical devices

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ATOMS; COATING TECHNIQUES; DIELECTRIC MATERIALS; ELECTROSTATICS; PROTECTIVE COATINGS; SEMICONDUCTOR DEVICE MANUFACTURE; STIFFNESS;

EID: 0036121903     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (9)

References (6)
  • 6
    • 0006361050 scopus 로고    scopus 로고


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.