Electrolyte based on-demand and disposable microbattery

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 236-239

  Lee, Ki Bang ^a   Lin, Liwei ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANODES; CATHODES; ELECTRIC BATTERIES; ELECTROLYTES; FABRICATION; GOLD; HYDROGEN PEROXIDE; MICROMACHINING; SULFURIC ACID; ZINC;

LIQUID ELECTROLYTE; MICROBATTERY; SURFACE MICROMACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 0036120665     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. Micro power from micro machinery
2. Power MEMS and microengines
3. A six-wafer combustion system for a silicon micro gas turbine engine
4. Electrophoresis system with integrated on-chip
5. Laterally driven electro-static repulsive-force microactuators using asymmetric field distribution
6. A triangular electrostatic comb array for micromechanical resonant frequency tuning
7. A miniaturized high-voltage solar cell array as an electrostatic MEMS power supply
8. Development of rechargeable microbatteries for autonomous MEMS application
9. Zinc bonding for MEMS packaging at the wafer-level