Spiral inductor substrate loss modeling in silicon RFICs

Microwave Journal

Volumn 42, Issue 3, 1999, Pages 66-81

  Kuhn, William B ^a   Yanduru, Naveen K ^a  

^a KANSAS STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIPOLAR INTEGRATED CIRCUITS; CMOS INTEGRATED CIRCUITS; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRIC LOSSES; ELECTRIC RESISTANCE; INTEGRATED CIRCUIT LAYOUT; RESONANT CIRCUITS; SEMICONDUCTOR DEVICE MODELS; SILICON WAFERS;

RADIO FREQUENCY INTEGRATED CIRCUITS (RFIC);

ELECTRIC INDUCTORS;

EID: 0033098283     PISSN: 01926225     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (19)

1. N.M. Nguyen and R.G. Meyer, "Si IC-compatible Inductors and LC Passive Filters," IEEE Journal of Solid-state Circuits, SC-25, 1990, pp. 1028-1031.
2. J.Y.C. Chang, A.A. Abidi and M. Gaitan, "Large Suspended Inductors on Silicon and Their Use in a 2 μm CMOS RF Amplifier," IEEE Electron Device Letters, Vol. 14, No. 5, May 1993, pp. 246-248.
3. K.B. Ashby, I.A. Koullias, W.C. Finley, J.J. Bastek and S. Moinian, "High Q Inductors for Wireless Applications in a Complementary Silicon Bipolar Process," IEEE Journal of Solid-state Circuits, January 1996, pp. 4-8.
4. J.R. Long and M.A. Copeland, "The Modeling, Characterization and Design of Monolithic Inductors for Silicon RFICs," IEEE Journal of Solid-state Circuits, Vol. 32, No. 3, March 1997, pp. 357-369.
5. P.C. Yue and S.S. Wong, "On-chip Spiral Inductors with Patterned Ground Shields for Si-based RFICs," IEEE Symposium on VLSI Circuits, 1997, pp. 85-86.
6. P.C. Yue and S.S. Wong, "On-chip Spiral Inductors with Patterned Ground Shields for Si-based RFICs," IEEE Journal of Solid-state Circuits, Vol. 33, No. 5, May 1998, pp. 743-752.
7. J.E. Ewen, S. Ponnapalli and M. Soyuer, "High Q Inductors in Silicon Technology without Expensive Metalization," US Patent 5,446,311, August 1995 (filed September 1994).
8. J.N. Burghartz, M. Soyuer and K.A. Jenkins, "Microwave Inductors and Capacitors in Standard Multilevel Interconnect Silicon Technology," IEEE Transactions on Microwave Theory and Techniques, January 1996, pp. 100-104.
9. J. Craninckx and M.S.J. Steyaert, "A 1.8 GHz Low Phase Noise CMOS VCO Using Optimized Hollow Spiral Inductors," IEEE Journal of Solid-state Circuits, SC-32, 1997, pp. 736-744.
10. H.G. Dill, "Designing Inductors for Thin-film Applications," Electronic Design, February 17, 1964, pp. 52-59.
11. W.B. Kuhn, A. Elshabini-Riad and F.W. Stephenson, "Center-tapped Spiral Inductors for Monolithic Bandpass Filters," Electronic Letters, Vol. 31, No. 8, 1995, pp. 625-626.
12. N.M. Nguyen and R.G. Meyer, "A 1.8 GHz Monolithic LC Voltage-controlled Oscillator," Proceedings of ISSCC, 1992, pp. 158-159.
13. Pipilos, Y.P. Tsividis, J. Fenk and Y. Papananos, "An Si 1.8 GHz RLC Filter with Tunable Center Frequency and Quality Factor," IEEE Journal of Solid-state Circuits, October 1996, pp. 1517-1525.
14. W.B. Kuhn, N.K. Yanduru and A.S. Wyszynski, "A High Dynamic Range, Digi" tally Tuned, Q-enhanced LC Bandpass Filter for Cellular/PCS Receivers," Proceedings of the IEEE MTT/RFIC Symposium, June 1998.
15. W.B. Kuhn, F.W. Stephenson and A. Elshabini-Riad, "A 200 MHz CMOS Q-enhanced LC Bandpass Filter," IEEE Journal of Solid-state Circuits, August 1996, pp. 1112-1122.
16. H.M. Greenhouse, "Design of Planar Rectangular Microelectronic Inductors," IEEE Transactions on Parts, Hybrids and Packaging, Vol. PHP-10, June 1974, pp. 101-109.
17. D. Krafesik and D. Dawson, "A Closed-form Expression for Representing the Distributed Nature of the Spiral Inductor," IEEE MTT Monolithic Circuits Symposium Digest, 1986, pp. 87-91.
18. A.Z. Grzegorek and W.J. McFarland, "Integrated Circuit Compatible Planar Inductors with Increased Q," US. Patent 5,760,456, June 2, 1998 (filed December 1995).
19. W.B. Kuhn, "Wafer Fabrication Processes for Creating High Q Spiral Inductors in CMOS and BiCMOS Integrated Circuits," US Patent application filed by Kansas State University Research Foundation, August 1998.