Magnetorheological suspension-based finishing technology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3326, Issue , 1998, Pages 527-535

  Kordonski, William ^a   Golini, Don ^a   Dumas, Paul ^a   Hogan, Stephen ^a   Jacobs, Stephen ^a  

^a QED TECHNOLOGIES   (United States)

Author keywords

Asphere; Bingham flow; Chemical mechanical polishing; Magnetorheological suspension; Precision optics

Indexed keywords

CHEMICAL MECHANICAL POLISHING; HYDRODYNAMICS; RHEOLOGY; SHEAR STRESS; SURFACE ROUGHNESS;

MAGNETORHEOLOGICAL SUSPENSIONS;

SUSPENSIONS (COMPONENTS);

EID: 0032402531     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.310670     Document Type: Conference Paper

References (18)

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16. Nanodiamonds enhance removal in magnetorheological Finishing