3D structures with piezoresistive sensors in standard CMOS

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1995, Pages 288-293

  Hoffman, E ^a   Warneke, B ^a   Kruglick, E ^a   Weigold, J ^a   Pister, K S J ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ACTUATORS; DIGITAL INTEGRATED CIRCUITS; ETCHING; GATES (TRANSISTOR); HINGES; INTEGRATED CIRCUIT LAYOUT; LINEAR INTEGRATED CIRCUITS; PIEZOELECTRIC DEVICES; SENSORS; SILICON; XENON;

ABSOLUTE TEMPERATURE SENSORS; PIEZORESISTIVE ACCELEROMETER; POLYSILICON PIEZORESISTORS; THREE DIMENSIONAL STRUCTURES; VISIBLE LIGHT IMAGING ARRAYS;

CMOS INTEGRATED CIRCUITS;

EID: 0029191569     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)