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Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4692, Issue , 2002, Pages 195-211

Nondestructive testing of damage layers in semiconductor materials by surface acoustic waves

(6) Schneider, Dieter b Stiehl, Eva a Hammer, Ralf c Franke, Andreas d Riegert, Richard e Schuelke, Thomas f

a SILTRONIC AG (Germany)

b FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS (Germany)

c FREIBERGER COMPOUND MATERIALS GMBH (Germany)

d DRESDEN UNIVERSITY OF TECHNOLOGY (Germany)

e Quad Group Inc (United States)

f Fraunhofer USA ^* (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; AGGLOMERATION; CRYSTALLOGRAPHY; DISPERSION (WAVES); ELASTIC MODULI; ETCHING; LASER APPLICATIONS; LASER PULSES; NONDESTRUCTIVE EXAMINATION; PIEZOELECTRIC DEVICES; POLISHING; SINGLE CRYSTALS; STIFFNESS;

LASER-ACOUSTIC SIGNALS;

SEMICONDUCTOR MATERIALS;

EID: 0036030795 PISSN: 0277786X EISSN: None Source Type: Journal
DOI: 10.1117/12.475660 Document Type: Article

Times cited : (10)

References (9)

1
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- (2000) Surface and Coatings Technology , vol.126 , pp. 136
- Schneider, D.¹ Witke, T.² Schwarz, T.³ Schöneich, B.⁴ Schultrich, B.⁵

2
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- R. Kuschnereit, H. Fath, A.A. Kolomenskiii, M. Szabadi, P. Hess, Appl. Phys. A 61(1995)269.
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- Kuschnereit, R.¹ Fath, H.² Kolomenskiii, A.A.³ Szabadi, M.⁴ Hess, P.⁵

3
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- (1997) Surface and Coating Technology , vol.91 , pp. 136
- Schneider, D.¹ Schwarz, T.²

4
- 0032738722
- D. Schneider, R. Hammer, M. Jurisch: Semicond. Sci. Technol. 14(1999)93.
- (1999) Semicond. Sci. Technol. , vol.14 , pp. 93
- Schneider, D.¹ Hammer, R.² Jurisch, M.³

5
- 0026471287
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- (1992) J. Acoust. Soc. Am. , vol.92 , pp. 2980
- Coufal, H.¹ Grygier, R.² Hess, P.³ Neubrand, A.⁴

6
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- D. Schneider, Th. Schwarz, B. Schultrich: Thin Solid Films 219(1992)92.
- (1992) Thin Solid Films , vol.219 , pp. 92
- Schneider, D.¹ Schwarz, T.² Schultrich, B.³

7
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- W.P. Mason, R.N. Thurston (Eds.), Academic Press, New York
- G.W. Farnell, E.L. Adler, in: W.P. Mason, R.N. Thurston (Eds.), Physical Acoustics., Vol. IX, Academic Press, New York, 1972, p. 35.
- (1972) Physical Acoustics , vol.9 , pp. 35
- Farnell, G.W.¹ Adler, E.L.²

8
- 84994393054
- in press
- D. Schneider, P. Siemroth, T. Schuelke, J. Berthold, B. Schultrich, H. Schneider, R. Ohr, B. Petereit, H. Hillgers, Surface and Coatings Technology, in press.
- Surface and Coatings Technology
- Schneider, D.¹ Siemroth, P.² Schuelke, T.³ Berthold, J.⁴ Schultrich, B.⁵ Schneider, H.⁶ Ohr, R.⁷ Petereit, B.⁸ Hillgers, H.⁹

9
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- R. Krause-Rehberg, H.S. Leipner, A. Polity, F. Rudolf, R. Hammer, M. Jurisch, Phys. Stat. Sol. (a) 158 (1996) 377.
- (1996) Phys. Stat. Sol. (a) , vol.158 , pp. 377
- Krause-Rehberg, R.¹ Leipner, H.S.² Polity, A.³ Rudolf, F.⁴ Hammer, R.⁵ Jurisch, M.⁶

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