Non-destructive testing of damage layers in GaAs wafers by surface acoustic waves

Semiconductor Science and Technology

Volumn 14, Issue 1, 1999, Pages 93-98

  Schneider, D ^a   Hammer, R ^b   Jurisch, M ^b  

^a FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

^b FREIBERGER COMPOUND MATERIALS GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC EMISSION TESTING; ACOUSTIC VARIABLES MEASUREMENT; ELASTIC MODULI; INGOTS; LASER DAMAGE; POLISHING; SEMICONDUCTING GALLIUM ARSENIDE; SURFACE STRUCTURE; VOLUME FRACTION;

POSITRON ANNIHILATION;

SEMICONDUCTOR DEVICE TESTING;

EID: 0032738722     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/14/1/015     Document Type: Article

References (12)

1. Schneider D and Schwarz Th 1997 Surf. Coat. Technol. 91 136
2. Schneider D and Tucker M D 1996 Thin Solid Films 290-291 3054
3. Cohen M L 1988 Mater. Sci. Eng. A 105-106 11
4. Kreher W and Pompe W 1989 Internal Stresses in Heterogeneous Solids, Physical Research vol 9 (Berlin: Akademie-Verlag) ch 4.3
5. Schneider D, Schwarz Th, Buchkremer H-P, Stöver D 1993 Thin Solid Films 224 177
6. Krause-Rehberg R, Leipner H S, Polity A, Rudolf F, Hammer R and Jurisch M 1996 Phys. Status Solidi a 158 377
7. Hurle D T J and Cockayne B 1993 Handbook of Crystal Growth II ed D T J Hurle (Amsterdam: Elsevier) p 101
8. Coufal H, Grygier R, Hess P and Neubrand A 1992 J. Acoust. Soc. Am. 92 2980
9. Grundmann M, Stier O and Bimberg D 1995 Phys. Rev. B 52 11969
10. Maznev A A 1995 Phys. Rev. Lett. 75 3332
11. Farnell G W and Adler E L 1972 Physical Acoustics vol IX, ed W P Mason and R N Thurston (New York: Academic) p 35
12. R Hütt 1977 Mater. Sci. Eng. 29 55