A novel technique for fabrication of multi-layered micro coils in microelectromechanical systems (MEMS) applications

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4700, Issue , 2002, Pages 187-195

  Chang, Hung Pin ^a   Qian, Jiangyuan ^a   Bachman, Mark ^a   Congdon, Phil ^b   Li, G P ^a  

^a University of California at Irvine   (United States)

^b TEXAS INSTRUMENTS   (United States)

Author keywords

MEMS; Micro actuator; Micro coils

Indexed keywords

COMPRESSION MOLDING; MICROACTUATORS; MICROMACHINING; MULTILAYERS; OPTICAL SWITCHES; SOLENOIDS; SURFACE ROUGHNESS;

MICRO COILS;

MICROELECTROMECHANICAL DEVICES;

EID: 0036029886     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.475030     Document Type: Article

References (11)

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