Chain conformation in ultrathin polymer films

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4690 I, Issue , 2002, Pages 342-350

  Jones, Ronald L ^a   Soles, Christopher L ^a   Starr, Francis W ^a   Lin, Eric K ^a   Lenhart, Joseph L ^a   Wu, Wen Li ^a   Goldfarb, Dario L ^b   Angelopoulos, Marie ^b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CONFORMATIONS; MOLECULAR DYNAMICS; MOLECULAR ORIENTATION; NEUTRON SCATTERING; PHOTORESISTS; PLASTIC FILMS;

CHAIN CONFORMATION;

ULTRATHIN FILMS;

EID: 0036029807     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.474232     Document Type: Article

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