Vacuum packaging of microresonators by rapid thermal processing

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4700, Issue , 2002, Pages 274-278

  Chiao, Mu ^a   Lin, Liwei ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; MICROMACHINING; POLYSILICON; SILICON NITRIDE; THERMAL EFFECTS; VACUUM APPLICATIONS;

MICRORESONATORS;

RESONATORS;

EID: 0036028815     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.475039     Document Type: Article

References (8)

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