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Volumn 17, Issue 9, 2002, Pages 1126-1131

Characterization of a simple glow discharge coupled to a time of flight mass spectrometer for in-depth profile analysis

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; INDUCTIVELY COUPLED PLASMA; INTERFACES (MATERIALS); ION SOURCES; MASS SPECTROMETERS; TRACE ELEMENTS;

EID: 0036025836     PISSN: 02679477     EISSN: None     Source Type: Journal    
DOI: 10.1039/b202408j     Document Type: Conference Paper
Times cited : (19)

References (29)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.