Langmuir probe potential measurements for reduced-pressure inductively coupled plasma mass spectrometry

Journal of Analytical Atomic Spectrometry

Volumn 12, Issue 7, 1997, Pages 697-701

  Yan, Xiaomei ^a,c   Huang, Benli ^a   Tanaka, Tomokazu ^b   Kawaguchi, Hiroshi ^b  

^a XIAMEN UNIVERSITY   (China)

^b NAGOYA UNIVERSITY   (Japan)

^c University of Florida   (United States)

Author keywords

Inductively coupled plasma mass spectrometry; Langmuir probe; Plasma potential; Reduced pressure plasma; Secondary discharge

Indexed keywords

ELECTRIC DISCHARGES; MASS SPECTROMETRY; ORIFICES; PLASMA APPLICATIONS; PROBES;

LANGMUIR PROBE; REDUCED PRESSURE INDUCTIVELY COUPLED PLASMA MASS SPECTROMETRY;

ELECTRIC VARIABLES MEASUREMENT;

EID: 0031175682     PISSN: 02679477     EISSN: None     Source Type: Journal    
DOI: 10.1039/a606934g     Document Type: Article

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