Characteristics of Au/PZT/TiO2/Nitride/Si structure capacitors with ICP nitride treatments

Journal of the Korean Physical Society

Volumn 40, Issue 1, 2002, Pages 172-175

  Min, Hyung Seob ^a   Kim, Taeho ^a   Jeon, Chang Bae ^a   Lee, Jaegab ^a   Kim, Jiyoung ^a  

^a Kookmin University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0036002432     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (11)

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