Actinometry study on the role of fluorine in low-k polyimide etching

Journal of the Korean Physical Society

Volumn 40, Issue 1, 2002, Pages 99-102

  Kim, Sang Hoon ^a   Lee, Chang Hee ^a   Ahn, Jinho ^a  

^a Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0036002399     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (10)

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