The interaction of the supersonic plasma-jet with the substrate in the RF plasma-chemical reactor

Contributions to Plasma Physics

Volumn 36, Issue 5, 1996, Pages 605-611

  Sicha M ^a   Hudicka Z ^a   Tichy M ^a   Novak M ^b   Soukup, L ^b   Jastrabik L ^b   Beiinke, J F ^c   Kapicka V ^d   Kapoun, K ^e   Sery M ^e  

^a CHARLES UNIVERSITY   (Czech Republic)

^b INSTITUTE OF PHYSICS   (Czech Republic)

^c UNIVERSITY OF GREIFSWALD   (Germany)

^d MASARYK UNIVERSITY   (Czech Republic)

^e UNIVERSITY OF SOUTH BOHEMIA   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

PLASMA JETS; SUPERSONIC AERODYNAMICS;

CHEMICAL DEPOSITION PROCESS; LIGHT INTENSITY; PLASMA-CHEMICAL PROCESS; PROPERTY; RF PLASMA; SUBSTRATE SURFACE; SUPERSONIC PLASMA JETS; THIN-FILMS;

CCD CAMERAS;

EID: 0039020203     PISSN: 08631042     EISSN: None     Source Type: Journal    
DOI: 10.1002/ctpp.2150360506     Document Type: Article

References (13)

1. BÁRDOŠ, L., Proc. XXI. ICPIG, Bochum (Germany), September, 19-24, 1393, G. ECKER, U. ARENDT, J. BÖSELLER, Eds.. Vol. III: Invited and additional papers, page 98.
2. RUTSCHER, A., WAGNER, H. E., Proc. XI. ICPIG, Prague (Czechoslovakia), September, 10-14. 1973, I. Štoll et al. Eds., Contributed Papers, page 125.
3. TICHÝ, M. ŠICHA, M., BÁRDOŠ, L., SOUKUP, L., JASTRABÍK, L., KAPOUN, K., TOUS, J., MAZANEC, Z., SOUKUP, R. J., Contrib. Plasma Phys., 34 (1994) 765.
4. BÁRDOS L., ŠTĚPÁNEK, I., Vacuum 40 (1990) 449.
5. BÁRDOŠ, L., TICHÝ, M., ŚÍCHA, M., KLAGGE, S., Proc. 8th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma, Stará Lesná (Czechoslovakia), May, 28 June, 1, 1990, Book of Contributed Papers (Part I), page 11.
6. SÍCHA, M., TICHÝ, M., ROHMANN, J., BÁRDOŠ, L., VU, N.Q., Proc. XX. International Conference on Phenomena in Ionized Gases, Il Ciocco, Barga (Italy), July 8-12, 1991, V. Palleschi, M. Vaselli, Eds., Contributed Papers, page 839.
7. BÁRDOŠ, L., DUŠEK, V.,Thin Solid Films 158 (1988) 265.
8. BÁRDOŠ, L., DUŠEK, V., VANĚČEK, M., J. Non-Cryst. Solids, 97 & 98 (1987) 81.
9. BÁRDOŠ, L., BERG, S., BLOM, H. O., Appl.Phys.Lett. 55 (1989) 1615.
10. BÁRDOŠ, L., BERG, S., BARÁNKOVÁ, H., J. Vac. Sci. Technology A11 (1993) 1486.
11. SOUKUP, L., PEŘINA, V., JASTRABÍK, L., ŠÍCHA, M., POKORNÝ, P., SOUKUP, R. J., NOVÁK, M., ZEMEK, J., (Germanium Nitride Layers, Prepared by Supersonic RF Plasma-Jet) Surface and Coating Technology, (1995) (in press).
12. BÁRDOŠ, L., BERG, S., NYBERG, T., BARÁNKOVÁ, H., NENDER, C., Diamond & Related Materials 2 (1993) 517.
13. BÁRDOŠ, L., BARÁNKOVÁ, H., NYBERG, T., BERG, S., Proc. 3rd Int. Symp. on Diamond Materials, Honolulu, Hawaii, May, 16-21, 1993, paper No. 535.