Thermoelectric infrared radiation sensor with monolithically integrated amplifier stage and temperature sensor

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 2, Issue , 1995, Pages 640-643

  Mueller, M ^a   Budde, W ^a   Gottfried Gottfried, R ^a   Huebel, A ^a   Jaehne, R ^a   Kueck, H ^a  

^a FRAUNHOFER INSTITUTE FOR MICROELECTRONIC CIRCUITS AND SYSTEMS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFIERS (ELECTRONIC); CMOS INTEGRATED CIRCUITS; INFRARED DETECTORS; INFRARED RADIATION; MONOLITHIC INTEGRATED CIRCUITS; SEMICONDUCTING SILICON COMPOUNDS; TEMPERATURE MEASUREMENT; THERMAL EFFECTS; THERMOCOUPLES; THERMOPILES;

INFRARED RADIATION SENSOR; SEPARATION BY IMPLANTED OXYGEN; SILICON THERMOCOUPLES; TEMPERATURE SENSOR;

SENSORS;

EID: 0029489935     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)