Stress-caused deflections of asymmetrical coated ' single-crystal silicon elements

Materials Research Society Symposium - Proceedings

Volumn 546, Issue , 1999, Pages 33-38

  Kuechler, M ^a   Griesbach, K ^a   Bertz, A ^a   Gessner, T ^a   Faust, V ^a   Dudek, R ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; COMPUTER SIMULATION; DRY ETCHING; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; SINGLE CRYSTALS; STRESS ANALYSIS;

STRESS-CAUSED DEFLECTIONS;

SILICON;

EID: 0033335248     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

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