Modeling of production scale reactive deposition

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 1999, Pages 23-28

  Greene, P ^a   Dannenberg, R ^a  

^a BOC Coating Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; FILMS; HYSTERESIS; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; PROCESS CONTROL; THREE TERM CONTROL SYSTEMS; TITANIUM DIOXIDE;

ACTIVE CONTROL; BERG MODEL; DEPOSITION RATE; HYSTERESIS CURVE; REACTIVE DEPOSITION;

DEPOSITION;

EID: 0032606256     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)