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Volumn 78, Issue 18, 2001, Pages 2661-2663

Observation of current crowding near fabricated voids in gold lines

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0035971902     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1368190     Document Type: Article
Times cited : (23)

References (14)
  • 8
    • 0040710371 scopus 로고    scopus 로고
    • Characterization and metrology for ULSI technology
    • edited by D. G. Seiler, A. C. Diebold, T. J. Shaffner, R. McDonald, W. M. Bullis, P. J. Smith, and E. M. Secula AIP, New York
    • R. Yongsunthon, J. McCoy, and E. D. Williams, in "Characterization and metrology for ULSI technology," AIP Conference Proc. No. 550, edited by D. G. Seiler, A. C. Diebold, T. J. Shaffner, R. McDonald, W. M. Bullis, P. J. Smith, and E. M. Secula (AIP, New York, 2001).
    • (2001) AIP Conference Proc. No. 550
    • Yongsunthon, R.1    McCoy, J.2    Williams, E.D.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.