Real-time x-ray microbeam characterization of electromigration effects in Al(Cu) wires

Applied Physics Letters

Volumn 78, Issue 18, 2001, Pages 2712-2714

  Wang, P C ^a   Noyan, I C ^a   Kaldor, S K ^a   Jordan Sweet, J L ^a   Liniger, E G ^a   Hu, C K ^a  

^a IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035971763     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1368189     Document Type: Article

References (21)

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