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Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 56, Issue 6, 2001, Pages 743-751

In situ monitoring of pulsed laser indium-tin-oxide film deposition by optical emission spectroscopy

(3) Cali C a Macaluso, R a Mosca, M a

a UNIVERSITY OF PALERMO (Italy)

Author keywords

Indium tin oxide films; Optical emission spectroscopy; Plasma diagnostics; Pulsed laser deposition

Indexed keywords

ELECTRIC CONDUCTIVITY OF SOLIDS; FLUORESCENCE; INDIUM COMPOUNDS; LASER ABLATION; OPTICAL FILMS; OXYGEN; PLASMA DIAGNOSTICS; PRESSURE EFFECTS; PULSED LASER DEPOSITION; TRANSPARENCY;

INDIUM TIN OXIDE; OPTICAL EMISSION SPECTROSCOPY;

EMISSION SPECTROSCOPY;

EID: 0035967689 PISSN: 05848547 EISSN: None Source Type: Journal
DOI: 10.1016/S0584-8547(01)00193-8 Document Type: Article

Times cited : (23)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.