Analysis characterisation and optimisation of temperature coefficient parameters in capacitive pressure sensors

Sensors and Actuators, A: Physical

Volumn 93, Issue 1, 2001, Pages 44-47

  Blasquez, G ^a   Douziech, C ^a   Pons, P ^a  

^a LAAS CNRS   (France)

Author keywords

Capacitive sensors; Silicon membrane; Structural parameters; Temperature coefficient; Temperature sensitivity

Indexed keywords

ALUMINUM; CAPACITANCE; MEMBRANES; PRESSURE MEASUREMENT; SILICON; SUBSTRATES; THERMODYNAMIC PROPERTIES; ULTRATHIN FILMS;

ALUMINIUM FIXED PLATES; CAPACITANCE TEMPERATURE COEFFICIENT; CAPACITIVE PRESSURE SENSOR; ISOMORPHOUS SENSORS; PYREX SUBSTRATES; SILICON MEMBRANES;

SENSORS;

EID: 0035948941     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00626-4     Document Type: Article

References (9)

1. Intrinsic thermal behaviour of pressure sensors
2. On the thermal expansion coefficients of thin films
3. Sensors for measuring pressure
4. Capacitive sensors
5. Sensors for measuring acceleration
6. Sensors for measuring sound
7. Approach to microsystem design
8. Microsensors and actuators for industrial process applications: Technology systems and their manufacture
9. Differential capacitive position sensor for planar MEMS structures with vertical motion