Thermal decomposition of bulk and heteroepitaxial (100) InP surfaces: A combined in situ scanning electron microscopy and mass spectrometric study

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 5, 1998, Pages 2672-2674

  Riesz, Ferenc ^a   Dobos, L ^a   Karanyi J ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; EVAPORATION; INDIUM; MASS SPECTROMETRY; MORPHOLOGY; NUCLEATION; PHOSPHORUS; PYROLYSIS; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS; SURFACES;

BULK SURFACES; HETEROEPITAXIAL SURFACES;

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 0032158384     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590254     Document Type: Article

References (15)

1. R. F. C. Farrow, J. Phys. D 7, L121 (1974); 8, L87 (1975).
2. R. F. C. Farrow, J. Phys. D 7, L121 (1974); 8, L87 (1975).
3. I. Mojxes, R. Veresegyházy, B. Kovács, B. Pécz, and V. Malina, Thin Solid Films 164, 1 (1988).
4. C. R. Bayliss and D. L. Kirk, J. Phys. D 9, 233 (1976).
5. S. N. G. Chu, C. M. Jodlauk, and W. D. Johnston, J. Electrochem. Soc. 130, 2398 (1983).
6. F. Riesz, K. Rakennus, T. Hakkarainen, and M. Pessa, J. Vac. Sci. Technol. B 9, 176 (1991).
7. F. Riesz, Ph. D. thesis, Hungarian Academy of Sciences, 1993.
8. L. Dobos, Doctoral thesis, Technical University of Budapest, 1993.
9. F. Riesz, K. Lischka, K. Rakennus, T. Hakkarainen, and A. Pesek, J. Cryst. Groth 114, 127 (1991); K. Rakennus, T. Hakkarainen, K. Tappura, and M. pessa, Proceedings of the 6th European Conference on MBE and Related Growth Methods, Tampere, Finland, April 1991, Paper F04.
10. F. Riesz, K. Lischka, K. Rakennus, T. Hakkarainen, and A. Pesek, J. Cryst. Groth 114, 127 (1991); K. Rakennus, T. Hakkarainen, K. Tappura, and M. pessa, Proceedings of the 6th European Conference on MBE and Related Growth Methods, Tampere, Finland, April 1991, Paper F04.
11. L. Dobos, J. Karányi, B. Pécz, B. Kovács, I. Mojzes, and V. Malina, Period. Polytech. Ser. El. Eng. (Budapest) 37, 21 (1993); L. Dobos, B. Kovács, I. Mojzes, V. Malina, B. Pécz, and J. Karányi, Mater. Res. Soc. Symp. Proc. 260, 641 (1992).
12. L. Dobos, J. Karányi, B. Pécz, B. Kovács, I. Mojzes, and V. Malina, Period. Polytech. Ser. El. Eng. (Budapest) 37, 21 (1993); L. Dobos, B. Kovács, I. Mojzes, V. Malina, B. Pécz, and J. Karányi, Mater. Res. Soc. Symp. Proc. 260, 641 (1992).
13. F. Riesz, C. Vignali, C. Pelosi, K. Rakennus, and T. Hakkarainen, J. Appl. Phys. 83, 246 (1998).
14. F. Riesz and J. Szabó (unpublished work). A large-scale periodicity of the surface relief was found, caused probably by the etching process applied prior to epitaxial growth. For the details of Makyoh topography, see J. Szabó, F. Riesz, and B. Szentpáli, Jpn. J. Appl. Phys., Part 2 35, L258 (1996).
15. F. Riesz and J. Szabó (unpublished work). A large-scale periodicity of the surface relief was found, caused probably by the etching process applied prior to epitaxial growth. For the details of Makyoh topography, see J. Szabó, F. Riesz, and B. Szentpáli, Jpn. J. Appl. Phys., Part 2 35, L258 (1996).