Fractal behaviour of the surface of in situ heat treated metal-InP contacts

Thin Solid Films

Volumn 317, Issue 1-2, 1998, Pages 69-71

  Mojzes, I ^a   Kovacs B ^a   Schuszter, M ^b   Kun, I ^b   Mate L ^b   Dobos, L ^c   David L ^d  

^a Dept Electronics Technol TU B ^*  (Hungary)

^b TU Institute of Building Constructions and Sanitary Engineering Budapest   (Hungary)

^c RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^d Inst of Microlectron and Technol   (Hungary)

Author keywords

Evaporation; Metallization; Semiconductors

Indexed keywords

FRACTALS; GEOMETRY; HEAT TREATMENT; MASS SPECTROMETRY; MORPHOLOGY; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING INDIUM PHOSPHIDE; SURFACES;

SURFACE PATTERN; VOLATILE COMPONENT LOSS;

OHMIC CONTACTS;

EID: 0032046025     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00507-5     Document Type: Article

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