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Volumn 482-485, Issue PART 1, 2001, Pages 160-165
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First-principles calculations of the adsorption and dissociation of PH3 on Si(0 0 1)-(2 × 1)
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Author keywords
Chemisorption; Density functional calculations; Phonons; Phosphine; Physical adsorption; Silicon; Surface relaxation and reconstruction
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Indexed keywords
ADSORPTION;
CHEMISORPTION;
DISSOCIATION;
MATHEMATICAL MODELS;
MOLECULAR DYNAMICS;
PHONONS;
PHOSPHORUS COMPOUNDS;
PROBABILITY DENSITY FUNCTION;
REACTION KINETICS;
RELAXATION PROCESSES;
SEMICONDUCTING SILICON;
FIRST-PRINCIPLES CALCULATIONS;
SURFACE RECONSTRUCTION;
SURFACE CHEMISTRY;
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EID: 0035919007
PISSN: 00396028
EISSN: None
Source Type: Journal
DOI: 10.1016/S0039-6028(00)01045-1 Document Type: Conference Paper |
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Times cited : (11)
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References (22)
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