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Solid State Communications

Volumn 120, Issue 11, 2001, Pages 445-450

Structural effect on electronic sputtering of hydrogenated amorphous carbon films

(9) Ghosh, S a Ingale, Alka b Som, T a Kabiraj, D a Tripathi, A a Mishra, S b Zhang, S c Hong, X c Avasthi, D K a

a INTER UNIVERSITY ACCELERATOR CENTRE (India)

b RAJA RAMANNA CENTRE FOR ADVANCED TECHNOLOGY (India)

c SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY (Singapore)

Author keywords

D. Electronic sputtering; D. Elsastic recoil detection analysis; D. Hydrogenated amorphous carbon; D. Raman spectroscopy; D. Swift heavy ion; D. Thermal spike

Indexed keywords

HEAVY IONS; HYDROGENATION; ION BOMBARDMENT; RAMAN SPECTROSCOPY; SPUTTERING;

ELECTRONIC SPUTTERING;

AMORPHOUS FILMS;

EID: 0035914571 PISSN: 00381098 EISSN: None Source Type: Journal
DOI: 10.1016/S0038-1098(01)00426-4 Document Type: Article

Times cited : (19)

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