Sensors on low-dimensional silicon structures

Sensors and Actuators, A: Physical

Volumn 62, Issue 1-3, 1997, Pages 621-623

  Bilenko, D ^a   Belobrovaya, O ^a   Jarkova, E ^a   Coldobanova, O ^a   Mysenko, I ^a   Khasina, E ^a  

^a SARATOV STATE UNIVERSITY   (Russian Federation)

Author keywords

Hydrogen sulfide sensors; Low dimensional silicon structures

Indexed keywords

AMORPHOUS SILICON; CARBON DIOXIDE; CARBON MONOXIDE; HYDROCARBONS; HYDROGEN SULFIDE; POROSITY; POROUS SILICON; SEMICONDUCTOR QUANTUM WELLS; SEMICONDUCTOR QUANTUM WIRES;

HYDROGEN SULFIDE SENSORS;

SILICON SENSORS;

EID: 0031177438     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01621-X     Document Type: Article

References (7)

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