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Volumn 391, Issue 2, 2001, Pages 247-254
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Microstructure and gas-sensing properties of (Sn,Ti)O2 thin films deposited by RGTO technique
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Author keywords
Gas sensor; Microstructure; Rheotaxial growth and thermal oxidation; SnO2
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Indexed keywords
CRYSTAL MICROSTRUCTURE;
FILM GROWTH;
LIGHT SCATTERING;
PHASE COMPOSITION;
SEMICONDUCTING TIN COMPOUNDS;
SPUTTER DEPOSITION;
SURFACE ROUGHNESS;
THERMOOXIDATION;
THIN FILMS;
TITANIUM DIOXIDE;
RHEOTAXIAL GROWTH AND THERMAL OXIDATION (RGTO) TECHNIQUES;
CHEMICAL SENSORS;
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EID: 0035898888
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(01)00990-7 Document Type: Conference Paper |
Times cited : (50)
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References (25)
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