Polysilicon resonant microbeam technology for high performance sensor applications

Technical Digest- IEEE Solid-State Sensor and Actuator Workshop

Volumn , Issue , 1992, Pages 153-156

  Guckel, H ^a   Rypstat, C ^a   Nesnidal, M ^a   Zook, J D ^a   Burns, D W ^a   Arch, D K ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ETCHING; PIEZOELECTRIC DEVICES;

BEAM DEFLECTION SENSORS; NITRIDE LPCVD PROCESS; POLYSILICIDE; POLYSILICON RESONANT MICROBEAM TECHNOLOGY;

SENSORS;

EID: 0026997983     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)